| Auto Feeder: |
Type IV [In-Line Station for Track Interface available] |
| |
| Reticle Size: |
5”, 0.09”t [with Reticle Cassette Bar Code Reader] |
| |
| Current Wafer Size: |
6”(4”, 5” and 8” Sizes Available) |
| |
| Magnification: |
X 1/5 |
| |
| Numerical Aperture: |
0.60 / 0.52 |
| |
| Image Field: |
20 mm [(X)11.14mm x (Y)26mm) |
| |
| Printing Wavelength: |
i-line (365 nm) |
| |
| Resolution: |
0.40μm |
| |
| Illumination Lamp: |
1.5 kW super-high-pressure mercury lamp |
| |
| Illumination Uniformity: |
< ±1.2 % |
| |
| Alignment Modes: |
TTL Off-Axis He-Ne TV TTL Off-Axis Broad Band TV |
| |
| Alignment Light Source: |
He-Ne Laser (633 nm) Broad Band (Halogen lamp) |
| |
| Alignment Accuracy: |
< 0.1μm (mean + 3 sigma) |
| |
| Throughput: |
> 68 wafers / hour (6”, 32 shots)
> 44 wafers / hour (8”, 60 shot) |
| |
| Wafer Leveling: |
Die-by-die tilt, Global tilt
|
